Laboratory On-Wafer-High frequency measuring technique

• General view of the CEDIC high frequency laboratory (P1)
• Manual probestation for probing DC test structures for I(V) measurements. Precision LCR meter allows to measure capacitances, inductances up to 1 MHz frequency. Four cahnnel semiconductor parameter analyzer HP4142 (P2)
• VNA HP8510C working from 45 MHz up to 50 GHz. and Maury tuner controller on the top. (P3)
• Two spectrum analysers E4440 and E4448 and 50 GHz signal generator for two tone intermodulation distortion measurements. (P4)
• A semiautomatic probestation from SUSS Mictrotech with adapted Maury tuner systems MT982E (0.75-8GHz) and MT984A (8-50 GHz) for noise parameter and load pull measurements. (P5) Details (P6, P7)

P1	P2
P3	P4
P5	P6	P7